In semiconductor manufacturing, the diffusion furnace is a critical component used for doping silicon wafers. This process introduces impurities into the wafers to create the p-type and n-type regions necessary for semiconductor devices. Precise temperature control is vital to ensure uniform doping and high-quality output. Our client faced significant challenges with their existing temperature control system, leading to frequent malfunctions, production disruptions, and increased maintenance costs. Additionally, the outdated system struggled to meet the evolving demands of modern semiconductor production, further exacerbating these issues and impacting overall efficiency.

Project Objective

The project’s main goal was to upgrade diffusion furnace temperature control systems to improve reliability, precision, and efficiency. This included advanced monitoring for early issue detection and comprehensive technical support. The new system needed to:

  • Reduce the failure rate of temperature controllers.
  • Ensure precise temperature control to maintain uniform doping of silicon wafers.
  • Integrate advanced monitoring features for proactive maintenance.
  • Minimize downtime and maintenance costs.
  • Provide comprehensive support and training to the client’s technical staff.

Dpstar Solution

Dpstar successfully implemented a tailored engineering solution to address the critical temperature control needs of semiconductor diffusion furnaces. This project involved sophisticated system analysis, the integration of advanced temperature controllers, and strategic enhancements to monitoring capabilities, significantly boosting operational efficiency and reliability.

  • System Analysis & Redesign
    We conducted a detailed analysis of the existing diffusion furnace temperature control system, identifying failure points and areas for improvement, then redesigned it to incorporate more reliable and precise components, ensuring greater stability and performance.
  • Advanced Temperature Controllers
    We integrated Shimaden SRS11A-8PN-90-N1010 controllers, known for their precision and reliability, to replace the outdated units, as they are essential for maintaining tight temperature tolerances, ensuring consistent quality and performance in the diffusion process.
  • Integration of Monitoring Features
    We enhanced the system with CT Coil monitoring capabilities, enabling real-time detection of heater breakups and other anomalies, significantly improving the system’s ability to preempt potential failures and maintain continuous operation.
  • Comprehensive Support & Training
    We established a dedicated on-site technical support team to provide immediate assistance and expertise, ensuring a rapid response to any operational issues, and offered extensive training programs for the client’s technical staff, empowering them to effectively operate and maintain the new system.