Switching & Protection Solutions | Enhancing Deposition Equipment in Semiconductor Fabrication
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Switching & Protection Solutions | Enhancing Deposition Equipment in Semiconductor Fabrication

By 27/02/2024March 6th, 2024No Comments

Elevating Efficiency in Semiconductor Fabrication

The semiconductor industry, known for its complex and meticulous manufacturing processes, stands as the backbone of the modern digital era. At the core of these processes is the vapor deposition technique, where precise layers of materials are deposited to create the integrated circuits at the heart of electronic devices. Ensuring the precision and safety of this process demands specialized switching and protection equipment, which is critical for the efficiency and reliability of semiconductor fabrication. These systems are the safeguards that ensure the high-powered machinery operates within safe parameters, protecting delicate circuits from electrical overloads and disruptions.

Elevating Efficiency in Semiconductor Fabrication

The semiconductor industry, known for its complex and meticulous manufacturing processes, stands as the backbone of the modern digital era. At the core of these processes is the vapor deposition technique, where precise layers of materials are deposited to create the integrated circuits at the heart of electronic devices. Ensuring the precision and safety of this process demands specialized switching and protection equipment, which is critical for the efficiency and reliability of semiconductor fabrication. These systems are the safeguards that ensure the high-powered machinery operates within safe parameters, protecting delicate circuits from electrical overloads and disruptions.

As a trusted provider of ABB’s low voltage products and solutions, Dpstar brings extensive knowledge and experience to the semiconductor industry, ensuring that each step of the manufacturing process is backed by reliable and efficient protection solutions. With over 30 years of expertise in electrical engineering and a deep understanding of the needs of semiconductor fabrication, Dpstar offers not just components, but comprehensive solutions that enhance the safety, efficiency, and reliability of the deposition process.

What is a Vapor Deposition Reactor

A Vapor Deposition Reactor is a tool used for coating materials, such as semiconductors, with a thin layer of another substance. It mainly operates through two processes: Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD). The objective of these methods is to precisely control the thickness, composition, structure, and appearance of the coating. This precision is crucial in the manufacture of electronic components like computer chips.

Physical Vapor Deposition (PVD)

PVD involves directly transferring a material onto another surface, similar to spray painting but at a microscopic level.

Chemical Vapor Deposition (CVD)

CVD utilizes chemical reactions between gases and the surface to deposit the material. When this process is enhanced with plasma, a form of ionized gas, it’s called Plasma-Enhanced CVD (PECVD), which speeds up the reaction.

Here’s how it works in simple terms:

1

Gas enters the reactor through inlets, controlled by devices called mass-flow controllers to regulate the amount of gas.
2

In some cases, plasma, an ionized form of gas, is generated by applying a high voltage. This plasma helps the gas to bond more effectively with the material being coated.
3

The reactor temperature is precisely maintained between 400°C and 1000°C. This control is achieved by heating either the chamber walls (hot-walled CVD) or the material placement plate (cold-walled setup).
4

Various control systems are in place to adjust the temperature, pressure, and flow rate within the reactor to ensure the coating is applied consistently and with the desired properties.
5

A vacuum pump maintains the necessary pressure inside the reactor by removing air and unwanted gases, creating a vacuum environment optimal for the deposition process.
6

Operators manage and monitor the process through a human-machine interface (HMI), which includes displays, buttons, and switches for adjusting settings and responding to the reactor's status.

Challenges in Vapor Deposition Reactor

Vapor deposition reactor technology is central to semiconductor fabrication and encounters specific challenges that directly impact production quality, efficiency, and safety. These challenges highlight the critical need for advanced switching and protection solutions.

Power Stability

Unstable power supply risks the uniformity of deposited layers, demanding effective protection against fluctuations and surges.

Equipment Reliability

The high incidence of equipment malfunctions leads to production halts, underscoring the need for durable switching mechanisms and protective gear to ensure continuous operation.

Process Control

Achieving precise control over deposition parameters requires sophisticated switching solutions to manage gas flow, plasma initiation, and substrate heating accurately.

Power Stability

Unstable power supply risks the uniformity of deposited layers, demanding effective protection against fluctuations and surges.

Equipment Reliability

The high incidence of equipment malfunctions leads to production halts, underscoring the need for durable switching mechanisms and protective gear to ensure continuous operation.

Process Control

Achieving precise control over deposition parameters requires sophisticated switching solutions to manage gas flow, plasma initiation, and substrate heating accurately.

Safety & Compliance

Ensuring operator safety and adherence to industry regulations necessitates integrated protection systems capable of handling high voltages and temperatures.

Thermal Management

Effective dissipation of heat generated during deposition processes is vital, requiring switching solutions that can regulate cooling systems efficiently.

Maintenance & Diagnostics

The complexity of deposition equipment demands advanced protection solutions with diagnostic capabilities to predict and prevent failures before they disrupt production.

Safety & Compliance

Ensuring operator safety and adherence to industry regulations necessitates integrated protection systems capable of handling high voltages and temperatures.

Thermal Management

Effective dissipation of heat generated during deposition processes is vital, requiring switching solutions that can regulate cooling systems efficiently.

Maintenance & Diagnostics

The complexity of deposition equipment demands advanced protection solutions with diagnostic capabilities to predict and prevent failures before they disrupt production.

Why You Need Switching & Protection Solutions?

The complexity of managing high power and meticulous control in deposition reactors is where switching and protection play a vital role. Switching mechanisms are employed to regulate gas flow, initiate plasma, and control heating elements, ensuring the reactor operates within the required parameters. Protection also plays a critical role in safeguarding the system from overcurrents and power surges, while also ensuring the safety of personnel. Without these safeguards, the intricate deposition process could face catastrophic failures, leading to costly downtimes and safety hazards.

Precision Enhancement

Switching solutions precisely manage gas flow, plasma generation, and temperature, ensuring the deposition process meets exact layer specifications.

System Defense

Protection solutions guard against electrical overloads and short circuits, protecting the high-value deposition equipment from damage and extending its lifespan.

Safety Assurance

Switching and protection systems are crucial for ensuring the safety of operators, as they effectively reduce electrical hazards and prevent accidents in the workplace.

Precision Enhancement

Switching solutions precisely manage gas flow, plasma generation, and temperature, ensuring the deposition process meets exact layer specifications.

System Defense

Protection solutions guard against electrical overloads and short circuits, protecting the high-value deposition equipment from damage and extending its lifespan.

Safety Assurance

Switching and protection systems are crucial for ensuring the safety of operators, as they effectively reduce electrical hazards and prevent accidents in the workplace.

Efficiency Boost

By ensuring smooth operations and minimizing equipment failure, these solutions boost production rates and lower operational costs.

Regulatory Alignment

Switching and protection mechanisms help meet strict industry standards, ensuring the manufacturing process remains reliable and compliant.

Reliability in Adverse Conditions

Switching and protection solutions provide reliability even in adverse conditions, offering a robust defense against unexpected challenges and contributing to uninterrupted production.

Efficiency Boost

By ensuring smooth operations and minimizing equipment failure, these solutions boost production rates and lower operational costs.

Regulatory Alignment

Switching and protection mechanisms help meet strict industry standards, ensuring the manufacturing process remains reliable and compliant.

Reliability in Adverse Conditions

Switching and protection solutions provide reliability even in adverse conditions, offering a robust defense against unexpected challenges and contributing to uninterrupted production.

Vapor Deposition Reactor

Fundamentals, Main Components & Functionalities

Main Components Functional Description
Main Power Circuit (not shown)
Tmax XT molded-case circuit breaker w/ Ekip Touch intelligent trip unit Main Power Distribution w/ [optional] power, current, energy measurement
OVR series surge protective device Transient overvoltage protection
Wafer Heater Plate (<1 kW/circuit)
ST200M C-curve supplementary protector (miniature circuit breaker) Supplemental overcurrent protection
AF series contactor Isolating contactor
Plasma RF Generator (<2.5 kW)
ST200M D-curve supplementary protector (miniature circuit breaker) Disconnecting and overcurrent protection for RF circuit
Vacuum Pump Circuit (<5 hp)
MS132 series manual motor protector Isolation, overload and short circuit protection
Contactor Remote isolation and control
MS132 series manual motor protector w/ enclosure, or EOT-series enclosed motor disconnect Disconnect means and isolation for vacuum pump circuit

Primary Functional Requirements

  • Switching and overcurrent protection for the primary power source
  • Protection against transient overvoltage conditions using a surge protective device
  • Switching, control and overcurrent protection for:
    – heater circuits
    – plasma RF generator
    – Vacuum pump circuit

Secondary Optional Requirements

  • Monitoring: where an outage or degradation to the performance of the equipment may adversely affect the process yield
    – Voltage, current, or temperature monitoring
    – Communication: to communicate parameters to the centralized monitoring system
  • Remotely-operated: need for remote control
  • Controls and signaling for all fab tool users (predominantly pilot devices)
  • Machine safety for users and service personnel

Switching & Protection Solutions For
Vapor Deposition Equipment

Discover our Switching & Protection solutions for straightforward deposition tool configuration considering PECVD architecture.

Field Descriptor Rating Units
Main Power Supply
System rated power [kW] 6 kW
AC Main Supply Voltage 208 V
AC Main OCPD Rating (In) 30 A
Short Circuit Current Rating 10 kA
Heater Circuit
Total Heater Circuit Power 1 kW
Heater Circuit Voltage Rating 120 V
Heater Circuit OCPD Rating (In) 10 A
RF Generator Circuit
RF Generator Circuit Power 1 kW
RF Generator Voltage Rating 120 V
RF Generator Circuit OCPD Rating (In) 10 A
Vacuum Pump Circuit
Vacuum Pump UL Horsepower Rating 5 hp
Vacuum Pump Voltage Rating 208 V (3-phase)
Control Circuit
Control Circuit Power Rating 0.24 kW
Control Circuit Voltage Rating 24 V DC
Control Circuit Current Rating 10 A

Wide Range Of ABB Products

As a trusted partner for ABB’s innovative solutions, Dpstar leads the way in offering a wide array of products specifically tailored for the semiconductor manufacturing sector. Our comprehensive selection of ABB solutions, ranging from advanced control systems and electrical protection equipment to thermal management solutions, is meticulously designed to meet the complex demands of the semiconductor industry. By enhancing power stability, streamlining process control, and ensuring the utmost safety for operators, Dpstar solidifies its position as the top choice for accessing ABB’s cutting-edge technologies. Through our commitment to customization and unparalleled support, we empower semiconductor manufacturers to elevate their production capabilities, ensuring precision, efficiency, and reliability in every aspect of Vapor Deposition Reactor operations.

Moulded Case Circuit Breakers (MCCB)

ABB’s MCCBs provide robust protection against overcurrents, ensuring the safety and reliability of electrical systems in various applications.

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Miniature Circuit Breakers
(MCB)

ABB’s MCBs offer compact and efficient protection against overloads and short circuits, ensuring the safety of residential and commercial electrical circuits.

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Thermal Overload Relays (TOR) & Electrical Overload Relays (EOLR)

ABB’s TORs and EOLRs provide precise protection against motor overloads, monitoring temperature and current to enhance motor longevity.

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Air Circuit Breakers (ACB)

ABB’s ACBs are designed for high-performance industrial protection, safeguarding electrical systems from faults and contributing to uninterrupted operations.

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Switches

ABB’s switches ensure seamless control of electrical circuits, offering reliability and precision in managing the flow of electricity.

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Contactors

ABB contactors excel in managing electrical connections in industrial applications, known for their durability and efficient power switching.

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Mini Contactors

ABB’s Mini Contactors are compact and powerful, delivering reliable control in limited space applications, providing precision in managing electrical loads.

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Soft Starters

ABB’s Soft Starters ensure smooth and controlled acceleration of motors, reducing mechanical stress and extending equipment lifespan, contributing to efficient and reliable motor operation.

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Inverters

ABB’s inverters are designed for precise control of motor speed and torque, offering energy-efficient solutions to enhance overall motor performance in various industrial applications.

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Empowering Semiconductor Fabrication

Advancing Semiconductor Technology with ABB’s Cutting-Edge Solutions

Dpstar at the forefront of addressing these challenges, providing a comprehensive suite of solutions designed to enhance the precision, efficiency, and safety of semiconductor fabrication processes. ABB’s innovative products, ranging from power stability mechanisms to sophisticated process control systems, are integral to overcoming the hurdles faced in vapor deposition. By ensuring reliable equipment operation, safeguarding against electrical hazards, and maintaining rigorous standards of quality and compliance, ABB solutions are instrumental in paving the way for breakthroughs in semiconductor technology.

Reach out to our team of experts to integrate ABB’s cutting-edge technology into your operations and pave the way for a more efficient, safe, and innovative future in semiconductor manufacturing.

Get In Touch With Our Experts Today!

Dpstar Group
No 35, Jalan OP ½, Pusat Perdagangan One Puchong,
Off Jalan Puchong, 47160 Puchong,
Selangor Darul Ehsan, Malaysia.
Email: [email protected]

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