Revolutionizing Airflow Control for High-Precision Semiconductor Manufacturing
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Revolutionizing Airflow Control for High-Precision Semiconductor Manufacturing

By 04/03/2025March 21st, 2025No Comments
Airflow That Powers Innovation

Smart Air Control for Semiconductor Production

Semiconductor manufacturing demands extreme precision, and even the smallest fluctuation in temperature, humidity, or air quality can lead to defects and production inefficiencies. To maintain optimal conditions, advanced Make-Up Air Units (MAU) and Air Handling Units (AHU) are essential, ensuring cleanroom stability, contamination control, and regulatory compliance.

Without precise air management, semiconductor facilities risk yield losses, electrostatic issues, and contamination, affecting overall production quality. Implementing intelligent automation and real-time monitoring in air handling systems ensures stable operations, improves efficiency, and reduces energy consumption.

Success Stories

Optimizing Airflow Control for Texas Instruments Philippines (Baguio)

Texas Instruments Philippines, a global leader in semiconductor manufacturing, upgraded its Baguio facility to support expanding operations. As part of this, a new Make-Up Air Unit (MAU) system was installed to regulate airflow, temperature, and humidity, ensuring a stable production environment.

To ensure seamless integration, Texas Instruments sought a high-performance automation and monitoring solution with advanced control, real-time data monitoring, and scalability to optimize environmental conditions and energy efficiency.

Project Scope & Requirements

Project Scope & Requirements

Enhancing system efficiency and reliability requires advanced automation and seamless integration. This project focused on upgrading the Make-Up Air Unit (MAU) and Air Handling Unit (AHU) with precise control mechanisms, real-time monitoring, and safety enhancements to ensure optimal performance and operational flexibility.

PLC &
Heater Panel Installation

Implementing a new PLC and Heater Panel for precise control of the MAU and AHU.

Custom PLC
Programming

Developing a custom PLC program to automate and optimize the system’s performance.

Local & Remote
Control

Enabling local and remote control capabilities for operational flexibility.

SCADA System
Integration

Integrating the system with SCADA for centralized monitoring and data analysis.

Enhanced
Safety Features

Installing Earth Leakage Relays (ELR) and a new PLC card to enhance safety and system reliability.

Termination Cabling &System Integration

Executing termination cabling for seamless integration of MAU and AHU panels.

Solutions

Dpstar successfully engineered and deployed a comprehensive automation and control system to support the operation of Texas Instruments Philippines’ newly installed Make-Up Air Unit (MAU) and Air Handling Unit (AHU) systems. Designed to meet the facility’s stringent environmental control requirements, the solution provided seamless system integration, intelligent control, and real-time monitoring, ensuring optimal performance and reliability.

By leveraging advanced PLC programming, SCADA integration, and electrical protection enhancements, Dpstar delivered a high-performance automation infrastructure that optimized system functionality, improved safety, and enhanced operational efficiency. The solution provided intelligent airflow management, energy-efficient operation, and flexible control capabilities, equipping the facility with a scalable and future-ready automation framework to support its evolving production needs.

Solutions

Dpstar successfully engineered and deployed a comprehensive automation and control system to support the operation of Texas Instruments Philippines’ newly installed Make-Up Air Unit (MAU) and Air Handling Unit (AHU) systems. Designed to meet the facility’s stringent environmental control requirements, the solution provided seamless system integration, intelligent control, and real-time monitoring, ensuring optimal performance and reliability.

By leveraging advanced PLC programming, SCADA integration, and electrical protection enhancements, Dpstar delivered a high-performance automation infrastructure that optimized system functionality, improved safety, and enhanced operational efficiency. The solution provided intelligent airflow management, energy-efficient operation, and flexible control capabilities, equipping the facility with a scalable and future-ready automation framework to support its evolving production needs.

Engineered Solutions for Precision & Efficiency

Customized PLC Programming & System Logic Development

A tailor-made PLC program was designed to provide intelligent, logic-based control over the MAU and AHU systems. Key features included:

  • Automated System Control: The PLC logic was structured to regulate air supply, temperature, and humidity based on operational parameters set by the client.
  • Local & Remote Control Functionality: Operators were given the flexibility to manage the system via on-site control panels or remote access, enhancing operational efficiency.
  • Modular & Scalable Architecture: The PLC program was designed to allow for future scalability, enabling easy integration with additional control points if required.

SCADA Integration for Centralized Monitoring & Data Acquisition

To ensure real-time system visibility and data-driven decision-making, the solution was integrated with a Supervisory Control and Data Acquisition (SCADA) system. This involved:

  • Modbus Communication Configuration: The PLC was programmed as a gateway for SCADA connectivity, facilitating seamless data exchange between system components.
  • Live System Monitoring & Alarming: Operators were equipped with real-time status updates, fault detection, and automated alerts, allowing for proactive system management.
  • Historical Data Logging & Analysis: Performance metrics and operational trends were logged, enabling predictive maintenance and long-term optimization.

Electrical Protection & System Reliability Enhancements

To fortify system safety and operational stability, key electrical protection measures were implemented:

  • Earth Leakage Relay (ELR) Installation: ELRs were deployed to mitigate electrical hazards, protecting both equipment and personnel from leakage currents.
  • New PLC Card Integration: A high-performance PLC card was installed to enhance processing speed, data handling, and communication reliability.

Cable Termination & System Commissioning

A structured termination and commissioning process was undertaken to ensure seamless system operation:

  • Precise Cable Termination for MAU & AHU Panels: All control and power cables were securely connected, tested, and verified to meet operational standards.
  • System Validation & Performance Testing: A comprehensive functional assessment was conducted to confirm system integrity, responsiveness, and compliance with client specifications.
  • Final Handover & Operator Training: Technical documentation and system training were provided to Texas Instruments personnel, enabling smooth operation and maintenance of the new control system.

Semiconductor Manufacturing & The Hidden Science of Air Quality Control

Semiconductor manufacturing demands an ultra-clean and precisely controlled environment where even minor fluctuations in temperature, humidity, or airborne contaminants can lead to defects, yield loss, and compromised product performance. Unlike other manufacturing sectors, semiconductor fabrication requires extreme precision, making airflow control and filtration a critical aspect of production efficiency.

Semiconductor Manufacturing & The Hidden Science of Air Quality Control

Semiconductor manufacturing demands an ultra-clean and precisely controlled environment where even minor fluctuations in temperature, humidity, or airborne contaminants can lead to defects, yield loss, and compromised product performance. Unlike other manufacturing sectors, semiconductor fabrication requires extreme precision, making airflow control and filtration a critical aspect of production efficiency.

Why Air Quality Matters in Semiconductor Production

To ensure precision in semiconductor fabrication, factories rely on Make-Up Air Units (MAU) and Air Handling Units (AHU) for:

Regulate Temperature & Humidity

Preventing condensation, static buildup, and material degradation.

Filter Airborne Contaminants

Ensuring sub-micron-level purity to avoid defects in wafer processing.

Maintain Cleanroom Pressure Balance

Preventing external contaminants from entering sensitive areas.

Understanding MAU & AHU in Semiconductor Manufacturing

💡 The Backbone of Cleanroom Environmental Control

In semiconductor manufacturing, maintaining an ultra-clean and stable environment is critical to ensuring defect-free microchip production. This is why Make-Up Air Units (MAU) and Air Handling Units (AHU) play an essential role in regulating airflow, temperature, humidity, and contamination levels within cleanrooms.

What is a Make-Up Air Unit

A Make-Up Air Unit (MAU) is designed to supply fresh, conditioned air to semiconductor cleanrooms while maintaining precise pressure, temperature, and humidity levels. It plays a critical role in contamination control, ensuring that the production environment remains stable and free from airborne particles.

Key Functions of MAU in Semiconductor Facilities:

✔ Fresh Air Supply: Replenishes air lost due to exhaust systems, preventing contamination inflow.
✔ Humidity Control: Maintains strict relative humidity (RH) levels to reduce static discharge risks.
✔ Temperature Regulation: Prevents microchip defects caused by temperature fluctuations.
✔ Pressurization Management: Works with the AHU to maintain positive pressure inside cleanrooms, keeping contaminants out.

What is an Air Handling Unit

An Air Handling Unit (AHU) is a critical component in semiconductor cleanrooms, responsible for circulating, conditioning, and filtering the air to maintain strict environmental stability. Unlike conventional air systems, AHUs work in conjunction with Make-Up Air Units (MAUs) to ensure consistent temperature, humidity, and air purity, preventing contamination and safeguarding precision manufacturing processes.

Key Functions of AHU in Semiconductor Facilities:

✔ Multi-Stage Filtration: Integrates HEPA/ULPA filters to eliminate airborne contaminants as small as 0.1 microns.
✔ Airflow Regulation: Maintains uniform air distribution, reducing turbulence inside the cleanroom.
✔ Temperature & Humidity Consistency: Works with the MAU to fine-tune environmental conditions with extreme accuracy.
✔ Static Charge Control: Ensures proper humidity levels to prevent electrostatic damage to sensitive components.

Optimizing Air Handling for Semiconductor Excellence

Innovating air handling to drive precision and performance in semiconductor fabrication

As semiconductor technology advances, airflow control and automation will play an even greater role in ensuring manufacturing excellence, product reliability, and energy efficiency. Whether integrating real-time monitoring, advanced filtration, or precision-driven automation, investing in cutting-edge MAU and AHU solutions is the key to optimizing semiconductor production. By implementing next-generation airflow management systems, manufacturers can achieve higher yields, fewer defects, and a controlled environment tailored for high-precision semiconductor fabrication.

Need expert guidance on semiconductor cleanroom air control? Contact us today to learn how our advanced air handling and automation solutions can enhance your facility’s performance and reliability.

Optimizing Air Handling for Semiconductor Excellence

Innovating air handling to drive precision and performance in semiconductor fabrication

As semiconductor technology advances, airflow control and automation will play an even greater role in ensuring manufacturing excellence, product reliability, and energy efficiency. Whether integrating real-time monitoring, advanced filtration, or precision-driven automation, investing in cutting-edge MAU and AHU solutions is the key to optimizing semiconductor production. By implementing next-generation airflow management systems, manufacturers can achieve higher yields, fewer defects, and a controlled environment tailored for high-precision semiconductor fabrication.

Need expert guidance on semiconductor cleanroom air control? Contact us today to learn how our advanced air handling and automation solutions can enhance your facility’s performance and reliability.

Get In Touch With Our Experts Today!

Dpstar Group
No 35, Jalan OP ½, Pusat Perdagangan One Puchong,
Off Jalan Puchong, 47160 Puchong,
Selangor Darul Ehsan, Malaysia.
Email: [email protected]

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