Accurate & Reliable Dewpoint Measurement in Semiconductor Production
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Accurate & Reliable Dewpoint Measurement in Semiconductor Production

By 28/12/2022No Comments

Semiconductor manufacturing requires innovative materials of the highest purity and quality to enable next-generation electronics with leading-edge technology. Production lines in the semiconductor industry must be equipped with the precise sensors in order to meet increasingly stringent quality and cost requirements. This means accurately detecting the smallest of movements, reliably identifying when tolerances are exceeded even slightly, and monitoring processes that are at the limit of what is physically possible.  Research has proven that precise control of the oxygen content and reliable, contamination free flow measurement on ultrapure water, utility water and gas, as well as raw water and wastewater are required for chips and other electronics components manufactured in clean rooms down to class 1.

A reliable and responsive instrument with global reach and technical capability is required to ensure the highest quality, manage costs, reduce environmental impact, and innovate for the future. At semiconductor fabrication plants and foundries across the world, Vaisala’s instruments have gained a reputation and trust for providing accurate and reliable measurements. The technologies required in the semiconductor industry are some of the most dynamic, sophisticated, and competitive. Vaisala instruments help semiconductor chip producers to increase throughput and stay competitive in high-growth markets without compromising the safety and maintenance in the applications that rely on precise level measurements that contain hazardous and harsh media. Our instruments will help you determine and adjust many different parameters throughout the semiconductor manufacturing process to create a better end product.

We offer a comprehensive range of precise sensors and measuring devices for various process steps within semiconductor manufacturing. Vaisala develops and produces adapted sensor and actuator solutions for series applications. Sensor technology by Vaisala has been used successfully in the semiconductor industry for many years, with the right solution for any measurement task: complex front-end processes, and back-end applications of wafer fab automation.

Semiconductor manufacturing requires innovative materials of the highest purity and quality to enable next-generation electronics with leading-edge technology. Production lines in the semiconductor industry must be equipped with the precise sensors in order to meet increasingly stringent quality and cost requirements. This means accurately detecting the smallest of movements, reliably identifying when tolerances are exceeded even slightly, and monitoring processes that are at the limit of what is physically possible.  Research has proven that precise control of the oxygen content and reliable, contamination free flow measurement on ultrapure water, utility water and gas, as well as raw water and wastewater are required for chips and other electronics components manufactured in clean rooms down to class 1.

A reliable and responsive instrument with global reach and technical capability is required to ensure the highest quality, manage costs, reduce environmental impact, and innovate for the future. At semiconductor fabrication plants and foundries across the world, Vaisala’s instruments have gained a reputation and trust for providing accurate and reliable measurements. The technologies required in the semiconductor industry are some of the most dynamic, sophisticated, and competitive. Vaisala instruments help semiconductor chip producers to increase throughput and stay competitive in high-growth markets without compromising the safety and maintenance in the applications that rely on precise level measurements that contain hazardous and harsh media. Our instruments will help you determine and adjust many different parameters throughout the semiconductor manufacturing process to create a better end product.

We offer a comprehensive range of precise sensors and measuring devices for various process steps within semiconductor manufacturing. Vaisala develops and produces adapted sensor and actuator solutions for series applications. Sensor technology by Vaisala has been used successfully in the semiconductor industry for many years, with the right solution for any measurement task: complex front-end processes, and back-end applications of wafer fab automation.

Our Capabilities

We are committed to solving our customers’ most complex analytical and process challenges. Our goal is to help you get the best results and the best performance from your control and monitoring equipment.

Improved product quality, efficiency & reliability

Meet compliance requirements

Quality & problem-solving expertise

In-depth experience in semiconductor production

Our Capabilities

 

Improved product quality, efficiency & reliability

Meet compliance requirements

Quality & problem-solving expertise

In-depth experience in semiconductor production

Organic Semiconductor Device

Organic semiconductors are solids composed of pi-bonded molecules or polymers composed of hydrocarbons and heteroatoms such as nitrogen, sulphur, and oxygen. They can be found as molecular crystals or as amorphous thin films. Organic electronic materials are lighter, more flexible, and less expensive than conventional silicon-based inorganic materials. Organic electronics are more energy-efficient and resource-friendly in production, use, and disposal.

Organic electronics can be made from conductive polymers using low-cost solution processing methods. Semiconductor polymers can be made soluble and turned into an ink, making it possible to print electronic circuits directly into large plastic sheets. These materials are compatible with large-area, roll-to-roll manufacturing processes, which can easily be scaled-up for rapid production at lower cost.

Organic conductive materials are used in:

  • Organic light-emitting diodes (OLEDs)
  • Organic field-effect transistors (OFETs)
  • Organic thin-film transistors (OTFTs)
  • Organic photovoltaics (OPVs)

Organic Semiconductor Device

Organic semiconductors are solids composed of pi-bonded molecules or polymers composed of hydrocarbons and heteroatoms such as nitrogen, sulphur, and oxygen. They can be found as molecular crystals or as amorphous thin films. Organic electronic materials are lighter, more flexible, and less expensive than conventional silicon-based inorganic materials. Organic electronics are more energy-efficient and resource-friendly in production, use, and disposal.

Organic electronics can be made from conductive polymers using low-cost solution processing methods. Semiconductor polymers can be made soluble and turned into an ink, making it possible to print electronic circuits directly into large plastic sheets. These materials are compatible with large-area, roll-to-roll manufacturing processes, which can easily be scaled-up for rapid production at lower cost.

Organic conductive materials are used in:

  • Organic light-emitting diodes (OLEDs)
  • Organic field-effect transistors (OFETs)
  • Organic thin-film transistors (OTFTs)
  • Organic photovoltaics (OPVs)

Glove Boxes In Organic Semiconductor Device R&D

A glove box is a sealed container used to manipulate objects in which a separate atmosphere is desired. Built into the sides of the glovebox are gloves arranged in such a way that the user can place their hands into the gloves and perform tasks inside the box without breaking containment. Part or all of the box is usually transparent to allow the user to see what is being manipulated.  A glove box is a confined volume containing an inert gas, different to air, allowing the handling of air and moisture sensitive compounds. In most cases, these boxes contain nitrogen or argon as an inert gas together with a purification unit to prevent the accumulation of moisture and oxygen within the box. The bigger the glove box, the more difficult it is to maintain a dry and air free atmosphere. Even if the glove box is initially air-free and well setup, every user needs to take as much care as possible not to contaminate the glove box with air, moisture, and corrosive volatile chemicals.

Many materials and chemicals are sensitive to moisture (anhydrous) and oxygen (anaerobic) and require tightly controlled environments containing low levels of oxygen and humidity during manufacture or research to ensure product quality. For laboratories that continually work with air sensitive or moisture sensitive chemicals, gloveboxes that maintain low oxygen (<1ppm O2) and humidity levels (<1ppm H2O) for long periods of time are essential.

Assuring the quality and monitoring of the controlled environment within the containment system must be dependable at all stages of product handling from charging, sampling, drying, packing, cleaning etc. During many of these operations the inert atmosphere within the glovebox needs to be analyzed to ensure there is no oxygen or moisture present.

Important parameters to be measured:

Oxygen sensitive products

Moisture sensitive products

Safety from explosions by reducing the oxygen level below the Lowest Explosion Limit (LEL)

Glove Boxes In Organic Semiconductor Device R&D

A glove box is a sealed container used to manipulate objects in which a separate atmosphere is desired. Built into the sides of the glovebox are gloves arranged in such a way that the user can place their hands into the gloves and perform tasks inside the box without breaking containment. Part or all of the box is usually transparent to allow the user to see what is being manipulated.  A glove box is a confined volume containing an inert gas, different to air, allowing the handling of air and moisture sensitive compounds. In most cases, these boxes contain nitrogen or argon as an inert gas together with a purification unit to prevent the accumulation of moisture and oxygen within the box. The bigger the glove box, the more difficult it is to maintain a dry and air free atmosphere. Even if the glove box is initially air-free and well setup, every user needs to take as much care as possible not to contaminate the glove box with air, moisture, and corrosive volatile chemicals.

Many materials and chemicals are sensitive to moisture (anhydrous) and oxygen (anaerobic) and require tightly controlled environments containing low levels of oxygen and humidity during manufacture or research to ensure product quality. For laboratories that continually work with air sensitive or moisture sensitive chemicals, gloveboxes that maintain low oxygen (<1ppm O2) and humidity levels (<1ppm H2O) for long periods of time are essential.

Assuring the quality and monitoring of the controlled environment within the containment system must be dependable at all stages of product handling from charging, sampling, drying, packing, cleaning etc. During many of these operations the inert atmosphere within the glovebox needs to be analyzed to ensure there is no oxygen or moisture present.

Important parameters to be measured:

Oxygen sensitive products

Moisture sensitive products

Safety from explosions by reducing the oxygen level below the Lowest Explosion Limit (LEL)

Our Success Story

Dewpoint Monitoring In OLED (Organic Light Emitting Diodes) Research

OLED (Organic Light Emitting Diodes) is a flat light emitting technology, made by placing a series of organic thin films (usually carbon based) between two conductors – and these films light up when electrical current is applied. OLEDs are used for creating the digital displays in electronic devices such as television screens, computer monitors, portable systems such as smartphones, handheld game consoles and PDAs. A major area of research is the development of white OLED devices for use in solid-state lighting applications. OLED displays an offer excellent image quality, are thinner, more efficient than LCD displays, and they can be flexible.

The main challenge in manufacturing reliable flexible OLEDs is the extreme sensitivity of organic semiconductors to moisture and oxygen. This means that OLEDs need to be protected – as even a single water or oxygen molecule can harm the OLEDs. Organic semiconductor device research and development requires precise ppm level H2O measurement. It is well known that organic semiconductor devices such as OLEDs and organic thin-film solar cells are very sensitive to H2O. OLED lifetime is critically shortened by water in the process and the organic thin-film solar cell has less efficiency if H2O levels are not low enough.

Our client requires long-term accurate measurement instruments with a quick response time from room conditions to a dry environment. The measurement instruments must also be suitable for both portable use and permanent installation. They used a Vaisala dewpoint transmitter for monitoring the H2O ppm level in a glove box used for researching organic semiconductor devices. They are using the DMT152 in atmosphere with organic solvent such as chlorobenzene, toluene and xylene. The Vaisala DRYCAP® Dewpoint Transmitter DMT152 is a thin-film polymer sensor for dewpoint measurement. It can measure down to -80°C Td (less than 1 ppm water) with high accuracy. The Vaisala DRYCAP® Sensor is immune to particulate contamination, water condensation and most chemicals. This means the transmitter has good tolerance in the glovebox for handling organic semiconductor devices and several organic solvents.

The DMT152 is very easy to use and convenient, it has good tolerance room condition high humidity. DMT152 is suitable for OLED process, not only research but also production process. Vaisala Dewpoint Transmitter DMT152 has several different types of installation accessories, screws, and flanges, making it easy to replace any transmitter that may already be installed in the glovebox. The DMT152 mechanics have been designed for harsh environments requiring protection against dust, dirt and splashed water. The Vaisala DRYCAP® technology has a low maintenance need due to its excellent long-term stability and durability against condensation. The recommended calibration interval is 2 years.

Customer Benefits 

Versatile solution that assures proper process conditions for OLED development

Long-term reliability that eliminates the need for constant maintenance

Capable of recording data and graphing

Vaisala DRYCAP® has very fast dry-down time and is not damaged in any way by high humidity conditions

Improved yield and reliability

 

Reduced design and manufacturing errors

 

Decreased equipment and process downtime

 

Improved workplace safety

Our Product Solution

Vaisala Indigo500 Series Transmitters

Vaisala DMT152 Dew Point Transmitter 

Vaisala DMT143 Miniature Dew Point Transmitters

Vaisala DMT143L Miniature Dew Point Transmitters

Vaisala Indigo500 Series Transmitters

Vaisala DMT152 Dew Point Transmitter 

Vaisala DMT143 Miniature Dew Point Transmitters

Vaisala DMT143L Miniature Dew Point Transmitters

Get The Best Results & Performance For Your Control & Monitoring Needs

Dpstar provides high-performance solutions for monitoring and control of environmental and process conditions in the semiconductor industry’s demanding needs. Semiconductor manufacturing, testing, and inspection processes require a high level of precision and efficiency to keep up with increasing design complexity and demands without sacrificing product quality. To accomplish this, you need the right type of instrumentation. Choosing the right type of measurement instrument is important in order to reach the best measurement results. We know how critical dependable control and monitoring devices can be to semiconductor processing, and we’re here to help you select the right equipment for your unique needs. Contact Us Today!

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Dpstar Group
No 35, Jalan OP ½, Pusat Perdagangan One Puchong,
Off Jalan Puchong, 47160 Puchong,
Selangor Darul Ehsan, Malaysia.
Email: [email protected]

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